Metal line layout in a memory cell

ABSTRACT

A memory cell is provided having polysilicon gates  2  running in a first direction. A sequence of layers metal lines are provided including layer of bit lines  4  running in a second direction substantially orthogonal to the first direction followed data lines  6  running in that second direction and then word lines  8  running in the first direction. The data lines  6  are precharged to a value which is held whilst the bit lines  4  are being used to sense data values stored within a memory cell.

BACKGROUND OF THE INVENTION

1. Field of the Invention

This invention relates to the field of integrated circuits. Moreparticularly, this invention relates to the metal line layout of memorycells for use within integrated circuits.

2. Description of the Prior Art

It is known to form integrated circuits which at a physical levelinclude polysilicon gate regions and sequences of spaced apart layers ofmetal lines. The polysilicon gate material is deposited in fingers andis typically used to form the gate material within transistors. Themetal lines are used to carry signals and to connect to the othercomponents within the integrated circuit.

Within the integrated circuit as a whole, and particularly as a processgeometries are becoming smaller, it is desirable that the polysilicongate material for the integrated circuit as a whole is laid down in asingle direction, i.e. with its long access parallel to a firstdirection. Similarly, it is desirable that at least the higher levellayers of metal lines are laid down in the same direction across boththe memory cells and the general purpose logic cells within theintegrated circuit. These conditions impose constraints upon memory celldesign at the physical level. A further constraint is the desire toprovide hierarchical data connections to the memory cells (e.g. throughbit lines and then data lines) in order to support banks of memory cellsso as to save power and increase speed through the use of shorter andeasier to drive lines. Another consideration is that it is normallydesirable that metal lines in adjacent layers should be orthogonal toeach other so as to reduce the capacitive coupling between those lines.

Conventional memory cells are unable to simultaneously meet the designconstraints explained above.

SUMMARY OF THE INVENTION

Viewed from one aspect the present invention provides a memory cellcomprising:

polysilicon gates disposed substantially parallel to a first directionand forming part of at least one gate within said memory cell; and

a sequence of spaced layers of metal lines comprising:

-   -   (i) a bit line disposed substantially parallel to a second        direction, said second direction being substantially orthogonal        to said first direction;    -   (ii) a data line disposed substantially parallel to said second        direction and in one of (a) a same layer as said bit line;        and (b) a layer above said bit line; and    -   (iii) a word line disposed substantially parallel to said first        direction and above said data line.

The memory cell in accordance with the present technique is able tosimultaneously meet the various design constraints expressed above. Thebit lines are substantially perpendicular to the polysilicon gates andthe data lines are substantially parallel with the bit lines; thisexploits the realisation that the bit lines and data lines are inpractice not used at the same time. The word lines disposed above thedata lines and parallel with the polysilicon gates then allow the metallayers to fall into step in their orientation with the higher levelmetal lines used across an integrated circuit as a whole.

The hierarchical nature of the memories in which the memory cells aredeployed can be further enhanced by the use of a global word linedisposed substantially parallel to the first direction and in the samelayer as the word line. This allows the word lines to be advantageouslyshorter and eases routing congestion, particularly when the global wordline is shared between adjacent memory cells in the second direction andcarries a word line select signal to select for accessing one of tworows of the memory cells adjacent in the second direction.

The hierarchical nature of the bit and data lines is exploited by usingthe bit line to carry a bit line signal to a sensing input of a senseamplifier and the data line to carry the sensed data output signal fromthe sense amplifier. Thus, the sense amplifiers can be relatively localto the memory cells with the data lines being used to carry the outputsof the sense amplifiers over longer distances across the integratedcircuit.

The parallel nature of the bit lines and the data lines in adjacentlayers would normally be considered to be a problem due to capacititivecoupling between these lines. However, the actual use of these lines isthat the bit lines are first used to connect to respective individualmemory cells and to produce a change in a bit line signal on a bit linewhich is then sensed by a sense amplifier and the sensed output thendriven out over the data lines. The data lines are held at a prechargedsignal level whilst the bit line signal is being sensed by the senseamplifier and accordingly the problems of capacitive coupling betweenthe bit and data lines are reduced.

The present memory cell design is particularly applicable to integratedcircuits in which the elements have a minimum feature size of 65 nm orless. The design constraints previously mentioned become increasinglydifficult to avoid as the processed geometries get smaller.

The bit lines are typically provided in pairs with a bit line signalchange on one of the bit lines of the pair indicating the data bitstored by a memory cell. Dual port memories may provide two pairs of bitlines.

It will be appreciated that the memory cell described above could beused in a variety of different forms of memory including RAM memory andROM memory.

The bit line, data line and word line layers of the memory celldiscussed above could have a range of absolute position within theoverall sequence of metal line layers of the integrated circuit, but areconventionally and advantageously toward the bottom of this sequence.Preferred embodiments do provide at least one layer of one or morecomponent interconnect lines disposed beneath the bit lines to provide amore fine grained connection of components within the memory cell orwithin general purpose logic cells of the integrated circuit.

A particularly preferred feature of at least some embodiments of thememory cell is that a ground power supply line maybe providedsubstantially parallel to the second direction and in the same layer asthe data line.

Viewed from another aspect the present invention provides an integratedcircuit comprising a plurality of memory cells each comprising:

polysilicon gates disposed substantially parallel to a first directionand forming part of at least one gate within said memory cell; and

a sequence of spaced layers of metal lines comprising:

-   -   (i) a bit line disposed substantially parallel to a second        direction, said second direction being substantially orthogonal        to said first direction;    -   (ii) a data line disposed substantially parallel to said second        direction and in one of (a) a same layer as said bit line;        and (b) a layer above said bit line; and    -   (iii) a word line disposed substantially parallel to said first        direction and above said data line.

Within an integrated circuit including an array of memory cells, thememory cells maybe divided into a plurality of banks with columns ofmemory cells within a bank and adjacent in the second direction sharingone or more bit lines line. Respective columns of memory cells withinadjacent banks can then share a data line.

The present technique allows the physical form of the memory cells tocomplement the form of associated general purpose logic cells within theintegrated circuit as a whole such that preferred embodiments include atleast one logic cell comprising polysilicon gates disposed substantiallyparallel to said first direction and forming part of at least one gatewithin said logic cell; and a logic cell sequence of spaced layers ofmetal lines comprising:

-   -   a first line disposed substantially parallel to said first        direction and in a same layer as said bit line;    -   a second line disposed substantially parallel to said second        direction and in a same layer as said data line; and    -   a third line disposed substantially parallel to said first        direction and in a same layer as said word line.

Viewed from another aspect the present invention provides a method offorming a memory cell having polysilicon gates disposed substantiallyparallel to a first direction and forming part of at least one gatewithin said memory cell and a sequence of spaced layers of metal lines,said method comprising the steps of:

-   -   (i) forming a bit line disposed substantially parallel to a        second direction, said second direction being substantially        orthogonal to said first direction;    -   (ii) forming a data line disposed substantially parallel to said        second direction and in one of (a) a same layer as said bit        line; and (b) a layer above said bit line; and    -   (iii) forming a word line disposed substantially parallel to        said first direction and above said data line.

The above, and other objects, features and advantages of this inventionwill be apparent from the following detailed description of illustrativeembodiments which is to be read in connection with the accompanyingdrawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 schematically illustrates layers of metal lines and theirorientation within two forms of memory cell;

FIG. 2 schematically illustrates layers of metal lines and theirorientation within a general purpose logic cell;

FIG. 3 illustrates the physical layout of a single port SRAM bit cell inaccordance with one example of the present technique;

FIG. 4 schematically illustrates the physical layout of a dual-port SRAMbit cell in accordance with another example of the present technique;

FIG. 5 schematically illustrates the physical layout of a ROM bit cellin accordance with a further example of the present technique;

FIG. 6 schematically illustrates the banked and hierarchical nature anSRAM memory, and

FIG. 7 schematically illustrates the hierarchical and banked nature of aROM memory.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

FIG. 1 example (a) schematically shows the orientation and sequence ofmetal lines within a memory cell. The polysilicon gate material 2 isdeposited in a first direction. An M2 metal layer is then used toprovide one or more bit lines 4 in a second direction, which issubstantially orthoganal (perpendicular) to the polysilicon gatematerial 2. An M3 metal layer is used to provide data lines 6, which aresubstantially parallel to the bit line 4. A word line 8 is provided inthe M4 metal layer substantially parallel to the first direction. Aglobal word line 10 is also provided in the M4 metal layer substantiallyparallel to the first direction and is shared between adjacent rows ofmemory cells. The M5 metal layer is substantially parallel to the seconddirection and includes further metal lines 12. Subsequent metal linesare provided in alternating substantially orthogonal directions above asrequired and in step with the corresponding higher level metal lines ofthe general purpose logic gate of FIG. 2.

In operation, the bit line 4 is used to carry a bit line signal derivedfrom a memory cell being read. This bit line signal is passed to a localsense amplifier (not shown in FIG. 1) where a change therein is detectedand used to generate a data output which is driven onto data line 6. Thedata line 6 is precharged to a fixed level during the sensing of the bitline 4 and accordingly capacitive coupling between the data line 6 andthe bit line 4 is reduced.

The polysilicon gate material 2 is used to form the gate of at least onetransistor within the memory cell in a conventional manor. Furthermore,an M1 metal layer beneath the bit line layer may be used to providecomponent interconnects within the memory cell. The global word line 10and the word line 8 are used to carry a select signal to control amemory cell to control it to output its stored data value via the bitline 4 and the data line 6.

The memory cell of FIG. 1 is formed in a process supporting a minimumfeature size of 65 nm or less. The layers shown are formed in a sequenceof deposition and etching steps that will be familiar to those in thetechnical field. 65 nm processes particularly benefit from use of thememory cell in accordance with the present technique as it allowsvarious design constraints of these processes to be more readily met.

FIG. 1 example (b) shows another example memory (bit) cell of thepresent technique. In this example both the bit line(s) 4 and the dataline 6 are in the M2 layer. Capacitive coupling is reduced since the bitline(s) 4 and data line 6 are not “active” at the same time (the datavalue had already been sensed from the bit line(s) 4 when the data line6 is driven from its precharged state by the sense amplifier).

The word line 8 is in the M3 layer in the first direction parallel tothe polysilicon gate material 2 and substantially orthagonal to the bitlines 4 and data line 6. The global word line 10 is in the M4 layer inthe first direction and shared with an adjacent memory cell in the firstdirection. A further metal line 12 is provided in the M5 layer withsubsequent metal lines being providing in alternating substantiallyorthogonal directions above as required in step with the correspondinghigher level metal lines of the general purpose logic cell of FIG. 2

It will be appreciated that examples of FIG. 1 show a single bit line 4,but in practice a pair of bit lines will be used in a single port memorycell and two pairs of bit lines will be used in a dual port memory cell.The memory cell generically illustrated in FIG. 1 may have a variety ofdifferent forms, such as a RAM memory cell or a ROM memory cell as willbe illustrated later. The M3 layer may also be used in some embodimentsto provide a ground power supply line to the memory cell. This is notillustrated in FIG. 1, but is shown in FIGS. 3 and 4 discussed below.

It will be appreciated by those in this technical field that the memorycell of FIG. 1 is normally provided as part of an array of memory cells.Placing the memory cells in to arrays in this way is important forimproving the circuit density and so allowing larger memory sizes. Inthis context, the division of the memory into a plurality of banks isadvantageous as it allows for improved speed of access and reduced powerconsumption at the cost of having to support hierarchical levels of bitand data lines, as well as local and global word lines in someembodiments. In this context, columns of memory cells in the seconddirection of an adjacent bank share the same data line in the seconddirection

It will be appreciated that the various metal layers M2, M3, M4 and M5illustrating FIG. 1 are laid down in sequence, as the integrated circuitof which they form part is manufactured. The forming of an integratedcircuit having the features discussed above forms one aspect of thepresent invention.

FIG. 2 schematically illustrates the metal line orientation used for ageneral purpose logic cell to be used in combination with the memorycell of FIG. 1. As will be seen in FIG. 2, the metal lines alternate indirection with the M1 layer being substantially parallel to the seconddirection of FIG. 1 and the M2 layer being substantially parallel to thefirst direction of FIG. 1. The polysilicon gate material used within thelogic cell is also substantially parallel to the first direction. TheM3, M4, M5 and further metal layers similarly alternate in orientationso as to reduce the capacitive coupling therebetween. It will be seenfrom a comparison of FIG. 1 and FIG. 2 that the polysilicon gates, M4and M5 metal layers all share their orientation. This eases the use ofM4 and M5 metal layers for power grid design. This also easesmanufacturing, particularly in small geomatries such as 65 nm and below.

FIG. 3 schematically illustrates the physical layout of a single-portSRAM bit cell implementation of the present technique. The same elementsillustrated in FIG. 1 have been given the same reference numerals inFIG. 3. In particular, the two bit lines 4 of the M2 layer are shownrunning in the second direction as well as the data line 6.

The word line 8 and the global word line 10 are shown running in theperpendicular first direction. Power supply lines 14 (which include afinal dog leg portion) are shown in the upper right hand corner of thecell and are disposed within the M3 layer sharing this with the dataline 6. The word line 8 and the global word line 10 share the M4 metallayer. The M5 layer and above are not shown in FIG. 3. The FIG. 3example corresponds to FIG. 1 example (a) with the bit lines 4 and dataline 6 in the M2 and M3 layers respectively.

FIG. 4 schematically illustrates the physical disposition of the metallines within a dual-port SRAM bit cell design in accordance with thepresent technique. In this example two sets of bit lines are shown aswell as two word lines thereby allowing the dual-port access to besupported. The FIG. 4 example corresponds to FIG. 1 example (b) with thebit line(s) 4 and the data lines 6 sharing the M2 layer.

FIG. 5 schematically illustrates the physical layout of the metal lineswithin a ROM bit cell implementation of the present technique. In thisexample it will be seen that a single bit line 4 is used oriented in thesecond direction in the M2 layer, a global data line 6 is used parallelto the bit line 4 and in the M3 layer above. A word line 8 is used inthe M4 layer oriented in the first direction.

FIG. 6 schematically illustrates the banked and hierarchical nature ofan SRAM implementation of the present technique. As illustrated, senseamplifiers 14 are provided in conjunction with column decoders betweenadjacent banks 16 of memory cells. The data lines 6 run the full heightof the memory and are shared between columns of memory cells in adjacentbanks throughout the memory. The bit lines 4 run within a bank and areshared between adjacent memory cells in the second direction with thebank. A global word line 10 is shared between adjacent rows of memorycells with the individual word lines 8 being dedicated to a row. Asillustrated, the global word line 10 is routed to the centre of a bankwhere it is subject to further decoding/routing, such that theappropriate one of the word lines 8 is selected and has a select signalasserted upon it.

FIG. 7 schematically illustrates a banked and hierarchical ROM memoryexample of the present techniques. The bit line (M2) and data line (M2)run in the second direction with the word line (M4) in the firstdirection.

Although illustrative embodiments of the invention have been describedin detail herein with reference to the accompanying drawings, it is tobe understood that the invention is not limited to those preciseembodiments, and that various changes and modifications can be effectedtherein by one skilled in the art without departing from the scope andspirit of the invention as defined by the appended claims.

1. A memory cell comprising: polysilicon gates disposed substantiallyparallel to a first direction and forming part of at least one gatewithin said memory cell; and a sequence of spaced layers of metal linescomprising: (i) a bit line disposed substantially parallel to a seconddirection, said second direction being substantially orthogonal to saidfirst direction; (ii) a data line disposed substantially parallel tosaid second direction and in one of (a) a same layer as said bit line;and (b) a layer above said bit line; and (iii) a word line disposedsubstantially parallel to said first direction and above said data line.2. A memory cell as claimed in claim 1, further comprising a global wordline disposed substantially parallel to said first direction.
 3. Amemory cell as claimed in claim 2, wherein said global word line isshared with an adjacent memory cell in said second direction and carriesa word line select signal to select for accessing one of two rows ofsaid memory cells adjacent in said second direction.
 4. A memory cell asclaimed in claim 1, comprising one or more memory cell transistorsresponsive to a select signal upon said word line to couple a storeddata value to said bit line.
 5. A memory cell as claimed in claim 1,wherein said bit line carries a bit line signal supplied to a sensinginput of a sense amplifier and said data line carries a sensed dataoutput signal from said sense amplifier.
 6. A memory as claimed in claim5, wherein said data line is held at a precharged signal level whilesaid bit line signal carried by said bit is being sensed by said senseamplifier.
 7. A memory cell as claimed in claim 1, wherein said memorycell is formed of elements having a minimum feature size of 65 nm orless.
 8. A memory cell as claimed in claim 1, further comprising afurther bit line disposed substantially parallel to said seconddirection and in a same layer as bit line, a signal value on either saidbit line or said further bit line being changed to represent a datavalue for said memory cell when said memory cell is accessed.
 9. Amemory cell as claimed in claim 1, wherein said memory cell is a RAMmemory cell.
 10. A memory cell as claimed in claim 9, wherein saidmemory cell is a dual port memory cell having a first pair of bit lineand a second pair of bit lines all being substantially parallel to saidsecond direction and in a same layer.
 11. A memory cell as claimed inclaim 1, wherein said memory cell is a ROM memory cell.
 12. A memorycell as claimed in claim 1, wherein said sequence of spaced layers ofmetal lines comprises a layer of one or more component interconnectlines disposed beneath said bit line.
 13. A memory cell as claimed inclaim 1, comprising a ground power supply line disposed substantiallyparallel to said second direction and in a same layer as said data line.14. An integrated circuit comprising a plurality of memory cells eachcomprising: polysilicon gates disposed substantially parallel to a firstdirection and forming part of at least one gate within said memory cell;and a sequence of spaced layers of metal lines comprising: (i) a bitline disposed substantially parallel to a second direction, said seconddirection being substantially orthogonal to said first direction; (ii) adata line disposed substantially parallel to said second direction andin one of (a) a same layer as said bit line; and (b) a layer above saidbit line; and (iii) a word line disposed substantially parallel to saidfirst direction and above said data line.
 15. An integrated circuit asclaimed in claim 14, wherein said plurality of memory cells are dividedinto a plurality of banks each formed as an array of said memory cells,respective columns of memory cells in said second direction and within abank sharing a bit line.
 16. An integrated circuit as claimed in claim15, wherein respective columns of memory cells within banks adjacent insaid second direction share a data line.
 17. An integrated circuit asclaimed in claim 14, comprising at least one logic cell comprising:polysilicon gates disposed substantially parallel to said firstdirection and forming part of at least one gate within said logic cell;and a logic cell sequence of spaced layers of metal lines comprising:(i) a first power grid line disposed substantially parallel to saidfirst direction and in a same layer as said word line; and (ii) a secondpower grid line disposed substantially parallel to said second directionand in a layer above said first power grid line.
 18. An integratedcircuit as claimed in claim 17, wherein said logic cell sequence ofspaced layers of metal lines comprises a layer of one or more componentinterconnect lines disposed beneath said first line.
 19. A method offorming a memory cell having polysilicon gates disposed substantiallyparallel to a first direction and forming part of at least one gatewithin said memory cell and a sequence of spaced layers of metal lines,said method comprising the steps of: (i) forming a bit line disposedsubstantially parallel to a second direction, said second directionbeing substantially orthogonal to said first direction; (ii) forming adata line disposed substantially parallel to said second direction andin one of (a) a same layer as said bit line; and (b) a layer above saidbit line; and (iii) forming a word line disposed substantially parallelto said first direction and above said data line.